AIP Publishing, a division of the American Institute of Physics, has announced an agreement with the National Institute of Standards and Technology (NIST) to make semiconductor research freely available online. Proceedings papers from the entire International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (formerly Characterization and Metrology for ULSI Technology) series are now freely available from websites of both organisations.
This agreement to make the proceedings freely available is expected to help professionals in the fast-paced semiconductor industry get up to speed on unfamiliar measurement and characterisation issues. In addition, they can learn about new techniques and equipment being introduced to characterise semiconductors.
These collected proceedings represent research and overviews of critical topics collected from worldwide experts in the field of semiconductor characterisation and metrology. Proceedings volumes are available in PDF format, up to and including the 2009 conference, on AIP's website at http://proceedings.aip.org/semiconductor_metrology, and on NIST's website at http://www.nist.gov/pml/semiconductor/conference/archives.cfm.
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